| | | Preface by S. Luryi and J. M. Xu and A. Zaslavsky | | |
| 1 | | From Microelectronics to Nanoelectronics: Roadmaps and Challenges | | |
| | | The 1980s and 1990s Microelectronics Logbook: Guidelines for the Future by D. Bois | | 3 |
| | | Driving Forces of Future Semiconductor Technology by C. G. Hwang and S. I. Lee and Y. D. Hong | | 13 |
| | | Future Trends in Large-Scale Integrated Circuit Technologies From an Industrial Perspective by Yoichi Unno and Hiroshi Iwai | | 21 |
| | | Driving Factors and Breakthroughs for Higher Performance Semiconductor Devices by H. Watanabe | | 33 |
| | | On the Edge of Ubiquitous Computing by J. Daniel Janowski and Trey Smith | | 41 |
| | | On Future Organization of Hybrid Chip Manufacturing by Eugene A. Feinberg and Serge Luryi | | 47 |
| | | The End of Scaling: Disruption from Below by Don Monroe | | 55 |
| | | Considerations Beyond Moores Law by Paul R. Jay | | 67 |
| | | Process Technology for Sub-0.1 [mu]m Silicon Devices by Junichi Murota and Takashi Matsuura and Masao Sakuraba | | 79 |
| | | Hot Carrier Degradation Issues in Submicron MOSFETs by K. Hess and L. F. Register and B. Tuttle | | 91 |
| 2 | | Beyond CMOS: SOI, Heterostructures, thin Films | | |
| | | SOI Technology: Renaissance of Science Fiction? by S. Cristoloveams | | 105 |
| | | Single- and Double-Gate SOI MOS Structures for Future ULSI: A Simulation Study by Claudio Fiegna and Antonio Abramo and Enrico Sangiorgi | | 115 |
| | | Can Silicon-Based Heterodevices Compete with CMOS for System Solutions? by E. Kasper and G. Reitemann | | 125 |
| | | Si/SiGeC Heterostructures: A Path Towards High Mobility Channels by R. Hartmann and Ulf Gennser and H. Sigg | | 133 |
| | | Potential of SiGe-Channel MOSFETs for a Submicron CMOS Technology by J. Alieu and T. Skotnicki and P. Bouillon | | 143 |
| | | Device Implications of Strain Relaxation in Semiconductor Microstructures by C. D. Akyuz and H. T. Johnson and A. Zaslavsky | | 155 |
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