Foundation of MEMS

Foundation of MEMS

Yazar : Chang Liu
Yayınevi : Pearson Education
ISBN : 9780273752240
Baskı yılı : 2011
Sayfa sayısı : 576
Ağırlık : 0.75 kg
Edisyon : 2
Stok durumu : Tükendi   

For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals.

Foundations of MEMS is an entry-level text designed to systematically teach the specifics of M

Preface to Second Edition
Preface to First Edition
Note to Instructors
About the Author
Notational Conventions

Chapter 1: Introduction
1.0. Preview????
1.1.? The History of MEMS Development????
1.1.1. From t